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High-resolution open-loop Z-stage for optical or interferometric applications.
- Precision nanopositioning stage designed for optical phase shifting in advanced interferometer applications. - Thin-stage - Achieves Z motion with tilt error correction through a tripod piezo-driven design. - Custom model support (e.g., closed-loop)
Input bandwidth for data or clock up to DC–32GHz.
The clock/data phase shifter from ADSANTEC, handled by AMT Co., Ltd., utilizes SiGe technology.
It controls the output phase of multiple RF power sources consistently.
For one reference signal, it controls the load voltage phase of two RF power supplies and matching devices, allowing each phase to be controlled by selecting either open-loop (feedforward control) or closed-loop (feedback control). - Open-loop (feedforward control) The phase is measured and controlled on the RF power supply side. General phase shifters use this method. - Closed-loop (feedback control) The phase is measured and fed back from a location closer to the plasma, specifically at the output end of the matching device. Compared to conventional methods, this allows for more accurate phase control. Specifications: NXE-03B-2P AC Input: 85–240V 50/60Hz 50VA Reference Frequency: 13.56MHz ±0.005% Phase Control Range: 0–359° Phase Measurement Accuracy: ±5° across the entire phase range Input Dynamic Range: Minimum input level 3dBm, Maximum input level 23dBm
